Absolute distance measurement using comb-spectrum interferometry Interferometrie ? dispersion pour mesure de distance

Author: Rovati L.   Minoni U.   Bonardi M.   Docchio F.  

Publisher: IOP Publishing

ISSN: 0150-536X

Source: Journal of Optics, Vol.29, Iss.3, 1998-01, pp. : 121-127

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Abstract

A measurement technique is proposed based on dispersive interferometry using a comb-spectrum source: dispersive comb-spectrum interferometry (DCSI). The configuration proposed processes the Michelson interferometer output by a dispersive grating in the Littrow configuration. Using a commercial low-cost laser diode source, the non-ambiguity measuring range was measured to be 1.6 mm, whereas the maximum permissible working distance, including ambiguity was measured to be 1.2 cm. The linearity error and stability were measured to be and 32 nm, respectively. La m?thode de m?sure qu'on propose se fonde sur l'interferometrie ? dispersion avec un spectre ? peigne: dispersive comb-spectrum interferometry (DCSI). La configurasion optique traite la lumiere qui sort d'un interferom?tre de Michelson en employant un reticule ? dispersion dans la configuration de Littrow. En utilisant une diode laser commerciale l'interval de m?sure sans ambiguit? est 1.6 mm, tandis que la distance maximal de functionament en includant l'ambiguit? est 1.2 cm. On a v?rifi? que les erreurs de linearit? et de stabilit? sont et 32 nm.

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