Formation of surface amorphous layers in semiconductors under low-energy light-ion irradiation: Experiment and theory

Author: Titov A.I.   Belyakov V.S.   Azarov A.Y.  

Publisher: Elsevier

ISSN: 0168-583X

Source: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.212, Iss.unknown, 2003-12, pp. : 169-178

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