The effect of nitrogen implantation on structural changes in semi-insulating InP

Author: Santhakumar K.   Jayavel P.   Reddy G.L.N.   Sastry V.S.   Nair K.G.M.   Ravichandran V.  

Publisher: Elsevier

ISSN: 0168-583X

Source: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.212, Iss.unknown, 2003-12, pp. : 197-200

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Abstract