Ion beam characterization and engineering of strain in semiconductor multi-layers

Author: Nageswara Rao S.V.S.   Pathak A.P.   Siddiqui A.M.   Avasthi D.K.   Muntele C.   Ila D.   Dev B.N.   Muralidharan R.   Eichhorn F.   Groetzschel R.   Turos A.  

Publisher: Elsevier

ISSN: 0168-583X

Source: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.212, Iss.unknown, 2003-12, pp. : 442-450

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