Efficient premature edge breakdown prevention in SiAPD fabrication using the standard CMOS process

Author: Kamrani Ehsan   Lesage Frederic   Sawan Mohamad  

Publisher: IOP Publishing

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.28, Iss.4, 2013-04, pp. : 45008-45013

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Abstract