Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

Author： Muralt P.   Baborowski J.  

Publisher： Springer Publishing Company

ISSN： 1385-3449

Source： Journal of Electroceramics, Vol.12, Iss.1-2, 2004-01, pp. : 101-108

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Microfabrication of Piezoelectric MEMS: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

By Baborowski J.  

Journal of Electroceramics, Vol. 12, Iss. 1-2, 2004-01 ,pp. : 33-51

Springer Publishing Company

Access to resources Recommend Favorite

Piezoelectric Microactuator Devices: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

By Maeda R.   Tsaur J.J.   Lee S.H.   Ichiki M.  

Journal of Electroceramics, Vol. 12, Iss. 1-2, 2004-01 ,pp. : 89-100

Springer Publishing Company

Access to resources Recommend Favorite

Thin Film Piezoelectrics for MEMS: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

By Trolier-McKinstry S.  

Journal of Electroceramics, Vol. 12, Iss. 1-2, 2004-01 ,pp. : 7-17

Springer Publishing Company

Access to resources Recommend Favorite

Submicrometer-Scale Patterning of Ceramic Thin Films: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

By Martin C.R.   Aksay I.A.  

Journal of Electroceramics, Vol. 12, Iss. 1-2, 2004-01 ,pp. : 53-68

Springer Publishing Company

Access to resources Recommend Favorite

RF Bulk Acoustic Wave Resonators and Filters: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

By Loebl H.P.  

Journal of Electroceramics, Vol. 12, Iss. 1-2, 2004-01 ,pp. : 109-118

Springer Publishing Company

Access to resources Recommend Favorite