Microfabrication of Piezoelectric MEMS: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

Author: Baborowski J.  

Publisher: Springer Publishing Company

ISSN: 1385-3449

Source: Journal of Electroceramics, Vol.12, Iss.1-2, 2004-01, pp. : 33-51

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