Thin Film Piezoelectrics for MEMS: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

By Trolier-McKinstry S.  

Journal of Electroceramics, Vol. 12, Iss. 1-2, 2004-01 ,pp. : 7-17

Springer Publishing Company

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Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

By Muralt P.   Baborowski J.  

Journal of Electroceramics, Vol. 12, Iss. 1-2, 2004-01 ,pp. : 101-108

Springer Publishing Company

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Microfabrication of Piezoelectric MEMS: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

By Baborowski J.  

Journal of Electroceramics, Vol. 12, Iss. 1-2, 2004-01 ,pp. : 33-51

Springer Publishing Company

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Piezoelectric Microactuator Devices: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

By Maeda R.   Tsaur J.J.   Lee S.H.   Ichiki M.  

Journal of Electroceramics, Vol. 12, Iss. 1-2, 2004-01 ,pp. : 89-100

Springer Publishing Company

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Editorial: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

By Setter N.  

Journal of Electroceramics, Vol. 12, Iss. 1-2, 2004-01 ,pp. : 5-6

Springer Publishing Company

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