Water-Immersible Micromachined Pb(Zr, Ti)O 3 Thin Film Actuators

Author: Jeon Yongbae  

Publisher: Springer Publishing Company

ISSN: 1385-3449

Source: Journal of Electroceramics, Vol.13, Iss.1-3, 2004-07, pp. : 509-513

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Abstract