Epitaxial Pb(Zr,Ti)O 3 Capacitors on Si by Liquid Delivery Metalorganic Chemical Vapor Deposition

Author: Yang S.  

Publisher: Springer Publishing Company

ISSN: 1385-3449

Source: Journal of Electroceramics, Vol.14, Iss.1, 2005-01, pp. : 37-44

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Abstract