Refractive index properties of SiN thin films and fabrication of SiN optical waveguide

Author： Kim D.   Yoon S.   Jang G.   Suh S.   Kim H.   Yoon D.  

Publisher： Springer Publishing Company

ISSN： 1385-3449

Source： Journal of Electroceramics, Vol.17, Iss.2-4, 2006-12, pp. : 315-318

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