Fabrication and characterization of co-planar type MEMS structures on SiO 2 /Si 3 N 4 membrane for gas sensors with dispensing method guided by micromachined wells

Author: Kim Soo-Ho   Park Joon-Shik   Lee In-Gyu  

Publisher: Springer Publishing Company

ISSN: 1385-3449

Source: Journal of Electroceramics, Vol.17, Iss.2-4, 2006-12, pp. : 995-998

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