Thin Film Praseodymium-Cerium Oxide Langasite-Based Microbalance Gas Sensor

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Journal of Electroceramics, Vol. 13, Iss. 1-3, 2004-07 ,pp. : 775-778

Springer Publishing Company

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Energy harvesting MEMS device based on thin film piezoelectric cantilevers

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PZT Thin Film Bi-Layer Devices for Phase Controlled Actuation in MEMS

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Thin Film Piezoelectrics for MEMS: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

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Coplanar Waveguide Using Ferroelectric Thin Oxide Film: Dielectric Constant

By Kim W.  

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