Optimization of saturation current density of PECVD SiN coated phosphorus diffused emitters using neural network modeling

Author： Cai L. Han S. May G. Kamra S. Krygowski T. Rohatgi A.

Publisher： Springer Publishing Company

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.25, Iss.11, 1996-11, pp. : 1784-1789

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