Modeling and algorithm development for automated optical endpointing of an HBT emitter etch

Author: Hanish C.   Grizzle J.   Chen H.   Kamlet L.   Thomas S.   Terry F.   Pang S.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.12, 1997-12, pp. : 1401-1408

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract