Author: Lin Chih-Hsiang Chang P. Murry S. Zhang D. Yang Rui Pei S. Malin J. Meyer J. Felix C. Lindle J. Goldberg L. Hoffman C. Bartoli E.
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.26, Iss.5, 1997-05, pp. : 440-443
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Abstract