Author: Webb D. Chan Y. Wong C. Lam Y. Leung K. Chrp D.
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.26, Iss.5, 1997-05, pp. : 470-473
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Journal of Electronic Materials, Vol. 27, Iss. 2, 1998-02 ,pp. :
By Bisoyi Sibani Rödel Reinhold Zschieschang Ute Takimiya Kazuo Klauk Hagen Bisoyi Sibani Bisoyi Sibani
Semiconductor Science and Technology, Vol. 31, Iss. 2, 2016-02 ,pp. :