Author: Han M. Kang T. Leem J. Song B. Hou Y. Baek W. Lee M. Bahng J. Kim K. Kim J. Kim H. Kim T.
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.26, Iss.6, 1997-06, pp. : 507-510
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Abstract