The use of computer controlled group V valved sources for interface type control in InGaSb/InAs strained layer superlattices

Author： Seaford M. Solomon J. Tomich D. Eyink K.

Publisher： Springer Publishing Company

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.28, Iss.8, 1999-08, pp. : 955-958

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Abstract

The purpose of this research is to demonstrate the necessity of computer controlled valved group V effusion cell sources in the growth of indium gallium antimonide/indium arsenide (InGaSb/InAs). These sources allow enhanced control of the group V flux. This flux control allows the reduction of unwanted cross contamination and complete control of the interface type. For simple structures, this control can be done manually, however, for complicated structures the control must be automated to allow for reproducibility and uniformity. The InGaSb/InAs strained layer superlattice (SLS) is an example of a complicated structure with hundreds of layers that requires interface type control. Arsenic incorporation with typical flux shuttering was found to be a problem in the growth of antimonide layers and limit interface type control. The antimony incorporation was not found to occur for the growth of arsenide layers. In addition, antimony exposure to critical interfaces did not appear to reduce the interface quality. This research demonstrates that the use of computer controlled valve sources is only required for the arsenic source when attempting to create InGaSb/InAs SLS structures.