Comparing ICP and ECR Etching of HgCdTe, CdZnTe, and CdTe

Author： Stoltz A.J.   Varesi J.B.   Benson J.D.  

Publisher： Springer Publishing Company

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.36, Iss.8, 2007-08, pp. : 1007-1012

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