Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

Author： Yu H.G.   Zou L.   Deng K.   Wolf R.   Tadigadapa S.   Trolier-McKinstry S.  

Publisher： Elsevier

ISSN： 0924-4247

Source： Sensors and Actuators A: Physical, Vol.107, Iss.1, 2003-10, pp. : 26-35

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