Fabrication planar coil on oxide membrane hollowed with porous silicon as sacrificial layer

Author： Zewen Liu   Yong Ding   Litian Liu   Zhijian Li  

Publisher： Elsevier

ISSN： 0924-4247

Source： Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 112-116

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