Fabrication of alloy and ceramic microstructures by LIGA-MA-SPS process

Author： Miyano N.   Tagaya K.   Kawase K.   Ameyama K.   Sugiyama S.  

Publisher： Elsevier

ISSN： 0924-4247

Source： Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 250-257

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