A novel planarization process for polysilicon sacrificial layers in a micro-thermal system

Author： Chen H.R.   Gau C.   Dai B.T.   Tsai M.S.  

Publisher： Elsevier

ISSN： 0924-4247

Source： Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 86-90

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