Optimization of lithographic masks using genetic algorithms

Author: Triltsch U.   Phataralaoha A.   Büttgenbach S.   Straube D.   Franke H.  

Publisher: Springer Publishing Company

ISSN: 0925-1030

Source: Analog Integrated Circuits and Signal Processing, Vol.48, Iss.1, 2006-08, pp. : 49-56

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Abstract