Influence of substrate cooling on femtosecond laser machined hole depth and diameter

Author: Zheng H.Y.   Lam Y.C.   Sundarraman C.   Tran D.V.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.89, Iss.2, 2007-11, pp. : 559-563

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Abstract