Determination of the transfer function for optical surface topography measuring instruments-a review

Author： Foreman Matthew R.   Giusca Claudiu L.   Coupland Jeremy M.   Török Peter   Leach Richard K.  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.24, Iss.5, 2013-05, pp. : 52001-52018

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