Ion energy distributions measured inside a high-voltage cathode in a BF 3 pulsed dc plasma used for plasma doping: experiments and ab initio calculations

Author: Godet Ludovic   Radovanov Svetlana   Sheuer Jay   Cardinaud Christophe   Fernandez Nicolas   Ferro Yves   Cartry Gilles  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.21, Iss.6, 2012-12, pp. : 65006-65022

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