Sorption and permeation characteristics of hybrid organosilicon thin films deposited by PECVD

Author: Bosc F.   Sanchez J.   Rouessac V.   Durand J.  

Publisher: Elsevier

ISSN: 1383-5866

Source: Separation and Purification Technology, Vol.32, Iss.1, 2003-07, pp. : 371-376

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Abstract