Intermediate species in a 2.45 GHz microwave plasma sustained in an argon-tetramethylsilane gas mixture

Author： Jauberteau J.L.   Jauberteau I.   Aubreton J.  

Publisher： Elsevier

ISSN： 1387-3806

Source： International Journal of Mass Spectrometry, Vol.228, Iss.1, 2003-08, pp. : 49-59

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