Annealing effect on microstructure and mechanical properties of magnetron sputtering Ti‐Si‐C thin film

Author： Chen Z S   Li H J   Fu Q G   Yang D   Shen Q L  

Publisher： Maney Publishing

ISSN： 1743-2847

Source： Materials Science and Technology, Vol.29, Iss.8, 2013-08, pp. : 975-979

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