International Journal of Manufacturing Technology and Management,volume 9,issue 1-2  (06-2012)

Period of time: 2012年1-2期

Publisher: Inderscience Publishers

Founded in: 2000

Total resources: 63

ISSN: 1368-2148

Subject: T Industrial Technology

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International Journal of Manufacturing Technology and Management,volume 9,issue 1-2

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Etching characteristics of a silicon surface induced by focused ion beam irradiation

By Kawasegi Noritaka,Morita Noboru,Yamada Shigeru,Takano Noboru,Oyama Tatsuo,Ashida Kiwamu,Taniguchi Jun,Miyamoto Iwao,Momota Sadao in (2006)

International Journal of Manufacturing Technology and Management,volume 9,issue 1-2 , Vol. 9, Iss. 1-2, 2006-06 , pp. 34-50

Inderscience Publishers

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