Journal of Micromechanics and Microengineering,volume 25,issue 1  (01-2015)

Period of time： 2015年1期

Publisher： IOP Publishing

Founded in： 1991

Total resources： 42

E-ISSN： 1361-6439|25|1

ISSN： 0960-1317

Subject： T Industrial Technology

Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Journal of Micromechanics and Microengineering,volume 25,issue 1

Menu

Welcome to the 2015 volume of the Journal of Micromechanics and Microengineering

Journal of Micromechanics and Microengineering,volume 25,issue 1 , Vol. 25, Iss. 1, 2015-01 , pp. 10201-10201

IOP Publishing

Abstract Access to resources Recommend Favorite

Stress investigation of the AlGaN/GaN micromachined circular diaphragms of a pressure sensor

Journal of Micromechanics and Microengineering,volume 25,issue 1 , Vol. 25, Iss. 1, 2015-01 , pp. 15001-15007

IOP Publishing

Abstract Access to resources Recommend Favorite

Direct metal micropatterning on needle-type structures towards bioimpedance and chemical sensing applications

Journal of Micromechanics and Microengineering,volume 25,issue 1 , Vol. 25, Iss. 1, 2015-01 , pp. 15002-15011

IOP Publishing

Abstract Access to resources Recommend Favorite

Low-loss silicon waveguides with sidewall roughness reduction using a SiO2 hard mask and fluorine-based dry etching

Journal of Micromechanics and Microengineering,volume 25,issue 1 , Vol. 25, Iss. 1, 2015-01 , pp. 15003-15010

IOP Publishing

Abstract Access to resources Recommend Favorite

An investigation of supercritical-CO2 copper electroplating parameters for application in TSV chips

Journal of Micromechanics and Microengineering,volume 25,issue 1 , Vol. 25, Iss. 1, 2015-01 , pp. 15004-15014

IOP Publishing

Abstract Access to resources Recommend Favorite

A microfabricated cyclo-olefin polymer microcolumn used for reversed-phase chromatography

Journal of Micromechanics and Microengineering,volume 25,issue 1 , Vol. 25, Iss. 1, 2015-01 , pp. 15005-15013

IOP Publishing

Abstract Access to resources Recommend Favorite

An integrated lubricant oil conditioning sensor using signal multiplexing

Journal of Micromechanics and Microengineering,volume 25,issue 1 , Vol. 25, Iss. 1, 2015-01 , pp. 15006-15017

IOP Publishing

Abstract Access to resources Recommend Favorite

A MEMS based acetone sensor incorporating ZnO nanowires synthesized by wet oxidation of Zn film

Journal of Micromechanics and Microengineering,volume 25,issue 1 , Vol. 25, Iss. 1, 2015-01 , pp. 15007-15015

IOP Publishing

Abstract Access to resources Recommend Favorite

A grayscale pneumatic micro-valve for use in a reconfigurable tactile tablet for vision-impaired individuals

Journal of Micromechanics and Microengineering,volume 25,issue 1 , Vol. 25, Iss. 1, 2015-01 , pp. 15008-15014

IOP Publishing

Abstract Access to resources Recommend Favorite

Design and test of reliable high strength ingressive polycrystalline silicon microgripper arrays

Journal of Micromechanics and Microengineering,volume 25,issue 1 , Vol. 25, Iss. 1, 2015-01 , pp. 15009-15020

IOP Publishing

Abstract Access to resources Recommend Favorite

Previous 1 2 3 Next Display item(s) per page Total 22 item(s)