Period of time： 2014年2期
Publisher： Springer Publishing Company
Founded in： 1995
Total resources： 27
ISSN： 0946-7076
Subject： TP Automation Technology , Computer Technology
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Microsystem Technologies,volume 20,issue 2
Menu
Design and control of a single-stage dual-actuator system for high-precision manufacturing
By Kim Michael,Lee Kwang-Hee,Nam Kyung-Tae,Lee Sang-Moo in (2014)
Microsystem Technologies,volume 20,issue 2 , Vol. 20, Iss. 2, 2014-02 , pp.
Access to resources
Recommend
Closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope
By He Yongsong,Wu Xiaosheng,Zheng Fu,Chen Wenyuan,Zhang Weiping,Cui Feng,Liu Wu in (2014)
Microsystem Technologies,volume 20,issue 2 , Vol. 20, Iss. 2, 2014-02 , pp.By Chu Donghui,Nemoto Akihiro,Ito Hiroshi in (2014)
Microsystem Technologies,volume 20,issue 2 , Vol. 20, Iss. 2, 2014-02 , pp.Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis
By He Liang,Toda Masaya,Kawai Yusuke,Miyashita Hidetoshi,Omori Mamoru,Hashida Toshiyuki,Berger Rüdiger,Ono Takahito in (2014)
Microsystem Technologies,volume 20,issue 2 , Vol. 20, Iss. 2, 2014-02 , pp.By Chen Xueye,Zeng Hong,Wei Xing,Yang Jincheng in (2014)
Microsystem Technologies,volume 20,issue 2 , Vol. 20, Iss. 2, 2014-02 , pp.A study on effect of wafer bow in wafer-level BCB cap transfer packaging
By Seok Seonho,Kim Janggil in (2014)
Microsystem Technologies,volume 20,issue 2 , Vol. 20, Iss. 2, 2014-02 , pp.Silicon 45° micromirrors fabricated by etching in alkaline solutions with organic additives
By Rola Krzysztof,Ptasiński Konrad,Zakrzewski Adrian,Zubel Irena in (2014)
Microsystem Technologies,volume 20,issue 2 , Vol. 20, Iss. 2, 2014-02 , pp.Transition interface for improving the temperature characteristics of micromachined gyroscopes
By Hou Zhanqiang,Wu Xuezhong,Xiao Dingbang,Chen Zhihua,Su Jianbin in (2014)
Microsystem Technologies,volume 20,issue 2 , Vol. 20, Iss. 2, 2014-02 , pp.Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators
By Mohamed Ali Mohamed,Yuan Wang,Takahata Kenichi in (2014)
Microsystem Technologies,volume 20,issue 2 , Vol. 20, Iss. 2, 2014-02 , pp.By Seo Kyoung,Park Jang,Jeong Hyeonsoo,Kim Dong in (2014)
Microsystem Technologies,volume 20,issue 2 , Vol. 20, Iss. 2, 2014-02 , pp.
Previous
Next