Period of time： 2004年1期
Publisher： Urban & Fischer
Founded in： 1946
Total resources： 41
ISSN： 0030-4026
Subject： O4 Physics
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Optik – International Journal for Light and Electron Optics,volume 114,issue 1
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A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering
By Tay Cho Jui,Quan Chenggen in (2003)
Optik – International Journal for Light and Electron Optics,volume 114,issue 1 , Vol. 114, Iss. 1, 2003-04 , pp.
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