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Period of time: 2006年1期
Publisher: VSP
Founded in: 1999
Total resources: 10
ISSN: 1568-5632
Subject: TN Radio Electronics, Telecommunications Technology
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Journal of Micromechatronics,volume 2,issue 1
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Deep X-ray exposure system with multistage for 3D microfabrication
By You Hui,Matsuzuka Naoki,Yamaji Tadahiro,Tabata Osamu in (2002)
Journal of Micromechatronics,volume 2,issue 1 , Vol. 2, Iss. 1, 2002-04 , pp.![](/images/ico/ico5.png)
By Shabouk Sohaib,Nakamoto Takeshi in (2002)
Journal of Micromechatronics,volume 2,issue 1 , Vol. 2, Iss. 1, 2002-04 , pp.![](/images/ico/ico5.png)
Micro parts reinforced by addition of unidirectional whiskers in laser photolithography
By Nakamoto Takeshi,Yamaguchi Katsumi,Obata Takayoshi in (2002)
Journal of Micromechatronics,volume 2,issue 1 , Vol. 2, Iss. 1, 2002-04 , pp.![](/images/ico/ico5.png)
Fabrication of electrostatic micro-actuators for a hard disk drive application
By Iizuka Tetsuhiko,Fujita Hiroyuki in (2002)
Journal of Micromechatronics,volume 2,issue 1 , Vol. 2, Iss. 1, 2002-04 , pp.![](/images/ico/ico5.png)
Micropositioners for microscopy applications and microbiology based on piezoelectric actuators
By Bergander A.,Breguet J.-M.,Clavel R. in (2002)
Journal of Micromechatronics,volume 2,issue 1 , Vol. 2, Iss. 1, 2002-04 , pp.![](/images/ico/ico5.png)
Spiral-type micro-machine for medical applications
By Ishiyama K.,Arai K. I.,Sendoh M.,Yamazaki A. in (2002)
Journal of Micromechatronics,volume 2,issue 1 , Vol. 2, Iss. 1, 2002-04 , pp.