Period of time： 2015年6期
Publisher： Taylor & Francis Ltd
Founded in： 1969
Total resources： 126
ISSN： 0021-8464
Subject： O6 Chemistry
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Journal of Adhesion,volume 82,issue 6
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Modeling of Particle Removal using Non-contact Brush Scrubbing in Post-CMP Cleaning Processes
By Chein Reiyu,Liao Wenyuan in (2006)
Journal of Adhesion,volume 82,issue 6 , Vol. 82, Iss. 6, 2006-07 , pp.
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