Nanochemical surface analyzer in CMOS technology

Author: Franks W.   Lange D.   Lee S.   Hierlemann A.   Spencer N.   Baltes H.  

Publisher: Elsevier

ISSN: 0304-3991

Source: Ultramicroscopy, Vol.91, Iss.1, 2002-05, pp. : 21-27

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Abstract