Evaluation of the adhesion of TiN films using nanoindentation and scratch testing

Author: Toparli Mustafa   Sasaki Shinya  

Publisher: Taylor & Francis Ltd

ISSN: 0141-8610

Source: Philosophical Magazine. A. Physics of Condensed Matter. Defects and Mechanical Properties, Vol.82, Iss.10, 2002-07, pp. : 2191-2197

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Abstract