DRESSING CHARACTERISTICS OF ORIENTED SINGLE DIAMOND ON CMP POLYURETHANE PAD

Author： Tsai M. Y.   Liao Y. S.  

Publisher： Taylor & Francis Ltd

ISSN： 1091-0344

Source： Machining Science and Technology, Vol.13, Iss.1, 2009-01, pp. : 92-105

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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