OPTIMIZATION OF LASER PARAMETERS FOR ULTRASHORT-PULSE LASER RECOVERY OF STICTION-FAILED MICROSTRUCTURES

Author： Fushinobu K.   Phinney L. M.   Kurosaki Y.   Tien C. L.  

Publisher： Taylor & Francis Ltd

ISSN： 1521-0634

Source： Numerical Heat Transfer Part A: Applications, Vol.36, Iss.4, 1999-09, pp. : 345-357

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