Post-chemical mechanical polishing cleaning of silicon wafers with laser-induced plasma

Author: Devarapalli Vamsi Krishna   Li Ying   Cetinkaya Cetin  

Publisher: Taylor & Francis Ltd

ISSN: 1568-5616

Source: Journal of Adhesion Science and Technology, Vol.18, Iss.7, 2004-07, pp. : 779-794

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Abstract