Non-contact removal of 60-nm latex particles from silicon wafers with laser-induced plasma

By Varghese Ivin   Cetinkaya Cetin  

Journal of Adhesion Science and Technology, Vol. 18, Iss. 7, 2004-07 ,pp. : 795-806

Taylor & Francis Ltd

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Submerged laser-induced plasma amplification of shockwaves using shock tubes for nanoparticle removal

By Dunbar Thomas J.   Peri M. D. Murthy   Varghese Ivin   Cetinkaya Cetin  

Journal of Adhesion Science and Technology, Vol. 21, Iss. 14, 2007-10 ,pp. : 1425-1437

Taylor & Francis Ltd

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Post-chemical mechanical polishing cleaning of silicon wafers with laser-induced plasma

By Devarapalli Vamsi Krishna   Li Ying   Cetinkaya Cetin  

Journal of Adhesion Science and Technology, Vol. 18, Iss. 7, 2004-07 ,pp. : 779-794

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Pressure amplification of laser induced plasma shockwaves with shock tubes for nanoparticle removal

By Dunbar Thomas  

Journal of Adhesion Science and Technology, Vol. 21, Iss. 1, 2007-01 ,pp. : 67-80

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Nanoparticle Removal Using Laser-Induced Plasma Shock Waves

By Peri M. D. Murthy   Varghese Ivin   Zhou Dong   John Arun   Li Chen   Cetinkaya Cetin  

Particulate Science and Technology, Vol. 25, Iss. 1, 2007-01 ,pp. : 91-106

Taylor & Francis Ltd

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