Numerical modeling of 3-D comb drive electrostatic accelerometers structure (method of levitation force reduction)

By Wiak Slawomir   Smólka Krzysztof  

COMPEL: Int J for Computation and Maths. in Electrical and Electronic Eng., Vol. 28, Iss. 3, 2009-05 ,pp. : 593-602

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique

By Dai Wen  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1745-1750

Springer Publishing Company

Access to resources Recommend Favorite

Investigation of the torsion and bending effects on static stability of electrostatic torsional micromirrors

By Rezazadeh Ghader   Khatami Faraz   Tahmasebi Ahmadali  

Microsystem Technologies, Vol. 13, Iss. 7, 2007-04 ,pp. : 715-722

Springer Publishing Company

Access to resources Recommend Favorite

Static and dynamic evaluation of Silicon-On-Insulator-based scanning micromirrors

By You Jianliang   Bhaskar Avinash K.   Packirisamy Muthukumaran   Bhat Rama B.  

International Journal of Intelligent Systems Technologies and Applications, Vol. 5, Iss. 1-2, 2008-05 ,pp. : 185-200

Inderscience Publishers

Access to resources Recommend Favorite

Modelling of electrostatic accelerator tubes

By Trowbridge C.W.   Hyder H.R.McK.  

COMPEL: Int J for Computation and Maths. in Electrical and Electronic Eng., Vol. 26, Iss. 3, 2007-06 ,pp. : 814-827

Emerald Group Publishing Ltd

Access to resources Recommend Favorite