Numerical modeling of 3-D comb drive electrostatic accelerometers structure (method of levitation force reduction)

Author: Wiak Slawomir   Smólka Krzysztof  

Publisher: Emerald Group Publishing Ltd

ISSN: 0332-1649

Source: COMPEL: Int J for Computation and Maths. in Electrical and Electronic Eng., Vol.28, Iss.3, 2009-05, pp. : 593-602

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