Identification of an equivalent model for the permanent magnets of a magnetron sputtering device

Author: Desideri Daniele   Maschio Alvise   Micu Dan Doru   Miron Olivia Ramona  

Publisher: Emerald Group Publishing Ltd

ISSN: 0332-1649

Source: COMPEL: Int J for Computation and Maths. in Electrical and Electronic Eng., Vol.31, Iss.2, 2012-03, pp. : 514-527

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