Characterization of a DC magnetron sputtering device

Author: Desideri D.   Bagatin M.   Spolaore M.   Antoni V.   Cavazzana R.   Martines E.   Serianni G.   Zuin M.  

Publisher: Emerald Group Publishing Ltd

ISSN: 0332-1649

Source: COMPEL: Int J for Computation and Maths. in Electrical and Electronic Eng., Vol.24, Iss.1, 2005-03, pp. : 261-270

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Abstract