Actinometry Measurement of Oxygen Dissociation Degree in a Microwave Discharge Plasma and Effect of Electron Energy Distribution Function

Author： Sakamoto Takeshi Matsuura Haruaki Akatsuka Hiroshi

Publisher： Science and Technology Network Inc.

ISSN： 1203-8407

Source： Journal of Advanced Oxidation Technologies, Vol.10, Iss.2, 2007-07, pp. : 247-252

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