Titanium Oxidation by Microwave Discharge Oxygen Plasma and Relationship with Plasma Parameters

Author: Kakizaka S.   Sakamoto T.   Matsuura H.   Akatsuka H.  

Publisher: Science and Technology Network Inc.

ISSN: 1203-8407

Source: Journal of Advanced Oxidation Technologies, Vol.10, Iss.2, 2007-07, pp. : 253-259

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