Monte Carlo Simulation of Thin Film Growth with Defect Formation: Application to Via Filling

Author: Kaneko Yutaka   Hiwatari Yasuaki   Ohara Katsuhiko  

Publisher: Taylor & Francis Ltd

ISSN: 0892-7022

Source: Molecular Simulation, Vol.30, Iss.13-15, 2004-11, pp. : 895-899

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